Diamond dresser for chemical mechanical planarization

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Application:

For on line dressing the pad of chemical mechanical planarization of semi-conductors.

Features:

1、special electroplating technology to guarantee reliable binding of diamonds.

2、special electroplating technology to guarantee the same height of protrusion of diamond grains.

3、special electroplated formula contribute to excellent durability to acid and alkaline.

Specification

Application equipment:

Applicable machine: Apply Mirra, Apply LK, Ebara

Also can be customized, and applied in all kinds of machine